We report the latest progress of GaN-based VCSELs with a curved mirror. Highly uniform and efficient devices were obtained. The average Ith was 0.64 mA with standard deviations of 0.043 mA. The peak WPE and output power were 13.4 % and 7.6 mW at 5.2 mA and 12.8 mA operating current, respectively. We obtained green VCSELs with mW-class output and a wall plug efficiency of 3.7%. We also report progress on VCSELs with a single cavity filtering mirror with a highly varying reflectivity spectrum to demonstrate single longitudinal mode operation for a VCSEL with a ~25 μm cavity length.
